Lambda Physik Ramps Up Production
for Lithography Excimer Lasers

FT. LAUDERDALE, FL, Dec. 3 -- Lambda Physik has announced the increased production of its NovaLine K2010 lithography excimer lasers. According to the company, NovaLine litho lasers have demonstrated their ability to meet the stringent demands of the semiconductor industry by providing high performance, aggressive cost of ownership, high uptime, and a flexible support plan. The first multiple-unit orders for a fab environment have been received and more are expected from major IC manufacturers. Shipments for the first production orders have already begun, said the company.

The NovaLine K2010 is a Krypton-Fluoride, 248 nm laser operating at a 2kHz repetition rate with an output power of 20 W. The laser is designed to provide an ultra-narrow linewidth of less than 0.6 pm; it is combined with a high NA, high-throughput scanner.

After shipping the first fully line-narrowed 2kHz, 193 nm excimer laser -- the NovaLine A2010 -- in July 1999, and additional units in the fourth quarter of fiscal 1999, Lambda Physik is ramping up production to meet expected increase demand in the current fiscal year.

The NovaLine A2010 was developed as part of a strategic partnership within the European ELLIPSE II project. According to Lambda Physik, careful selection of materials has improved transmission characteristics of the internal resonator optics and substantially improved maintenance intervals and related operating costs over other existing technologies. With a 2 kHz repetition rate and 10 W output power, NovaLine lasers are designed to enabled increased scan speeds and maximized throughput. The NovaLine laser is used with high throughput, wide field, 193 nm step and scan systems.

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