Lambda Physik Receives New
Orders from SVG Lithography Systems

FT. LAUDERDALE, FL, Feb. 9 -- Lambda Physik has announced the receipt of new orders for its NovaLine A4020 and NovaLine F2020 lasers from Silicon Valley Group (SVG), a multi-product manufacturer of automated wafer-processing equipment for the semiconductor industry.

According to Lambda Physik, this sale demonstrates the importance of 193-nm technology for semiconductor manufacturing and shows that both companies are committed to forwarding the evolution of this technology. The NovaLine A4020 is an Argon-Fluoride, 193-nm laser operating at a 4 kHz repetition rate with an output power of 40 watts. This laser provides a partially narrowed beam specifically designed for SVG Lithography Systems' MS193 high-NA, high-throughput scanner. Lambda Physik says that the increase to 4 kHz enables customers to take full advantage of scanner improvements and maximize wafer throughput.

"The move to 4 kHz, 193-nm lasers is a key part of our long-term product roadmap that is continuously aligned to meet SVG's requirements and the needs of the end user," said Dr. Dirk Basting, founder and president of Lambda Physik.

The NovaLine F2020 is an F₂ 157-nm laser operating at a 2 kHz repetition rate with an output power of 20 W. This laser uses a patented line-selection resonator to provide single-line operation with a bandwidth of -1.5 pm (FWHM). Lambda Physik asserts that the design is perfectly suited for SVG's catadioptric lens. Lambda shipped the first "lithography-grade" F₂ laser (F1020) and plans to release the 2 kHz, 20 W version (F2020) by midyear 2000 for integration into SVG's full-field scanners.

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