Lambda Physik Introduces the DuraTube

FORT LAUDERDALE, Jan. 12 -- The new DuraTube from Lambda Physik is a laser tube specifically designed for F₂ laser operation at 157 nm. Development of the DuraTube is based on the metal/ceramic design of Lambda Physik's NovaTube technology, which received the award for Best Innovation of German Industry in 1995.

According to Lambda Physik, the DuraTube is optimized in gas circulation geometry and components resulting in a significantly increased gas lifetime for F₂ operation. For example, says the company, a gas lifetime for the LPF^TM laser has been measured in energy constant mode at more than 20 million pulses. Lambda Physik says that the breakthrough in F₂ laser technology offers the highest commercially available gas lifetime and reliability without cryogenic gas purifying. All Lambda Physik F₂ lasers, including the LPF^TM, OPTex^TM, NovaLine F600, and NovaLine 1000 series, are equipped with the new DuraTube.

The DuraTube is assembled with resonator mirror fittings (except OPTex) designed for easy mirror exchange in combination with a highly isolated beam path. A VUV adapter, for complete isolation of the beam path, and an energy monitor are standard on all LPF and NovaLine F₂ lasers.

Lambda Physik says that the increased gas lifetime, in combination with energy stabilization, offers significant advantages for F₂ laser processing at 157 nm that requires maximum performance, reliability, and efficiency. Applications for Lambda Physik's F₂ lasers include optics testing or DUV lithography at 157 nm. According to the company, the optimized DuraTube performance results in significantly longer uptime for the laser system, and therefore in lower running costs for the customer.

PTB Home