Coherent Demos "Azure" CW 266-nm Laser Source

SANTA CLARA, CA, July 13 -- Coherent, Inc., Laser Group demonstrated a prototype of its second-generation, continuous-wave (CW), diode-pumped laser source at Semicon West, which was held July 10-12 in San Francisco, CA. According to the company, this 266-nm laser source -- named "Azure" -- is ideal for integration into semiconductor-metrology tools and represents a key step for the company in implementing a technology roadmap tailored to the semiconductor industry.

"Coherent began shipping the first-generation CW 266-nm solid-state laser system over a year ago to customers who were developing inspection tools for the ever-decreasing feature and defect sizes in semiconductor wafers and reticles," said Jim Hopkins, vice president and business-unit manager for Coherent's Semiconductor and Microelectronics Business Unit. "The prototype Azure system we showed at Semicon represents the second generation of this technology, customized as the result of feedback from users of the original units."

Coherent says that a key modification to the 266-nm device is the automatic control of all operating features, essential for developing production-worthy inspection tools.

"For some time now, Coherent has been working on a CW UV laser technology roadmap based on metrology tool requirements," said Colin Seaton, business development manager for Coherent's Semiconductor and Microelectronics Business Unit. "We have enormous technology experience and diversity in CW violet, UV, and deep-UV ion lasers as well as leading-edge, diode-pumped, solid-state CW, and pulsed UV lasers with active control systems. This CW 266-nm source represents a marriage of our UV application experience and technology portfolio."

Beta test units of the Azure are scheduled for availability by the end of 2000, with commercial availability in 2001.

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